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陈宜方

系别: 微纳系统中心
职称: 教授 博导
职务: 副主任
办公室: 微电子楼305室
电话:
E-mail: yifangchen@fudan.edu.cn
主页: http://www.nanolith.fudan.edu.cn/
   
教育背景
1995    英国牛津大学Clarendon Laboratory凝聚态物理系   理学博士
1985   中科院上海技术物理研究所半导体器件物理与工艺   理学硕士
1982   上海复旦大学物理系电子物理专业   理学学士
研究方向
一、纳米技术
1. 纳米光刻(Nanolithography):  高分辨率电子束光刻(High resolution electron beam lithography)  纳米压印光刻(Nanoimprint lithography)  卷对卷微纳滚动热压印(Micro Nano roll-to-roll embossing/printing)  三维电子束灰度光刻技术(Grey scale EB-lithography for 3D profile)  Stencil光刻(Stencil lithography)  Stencil近场光刻(Stencil near field lithography (patented))  电子束全息光刻技术(EBL for holography)  泰伯效应纳米光刻(Talbot nanolithography)  光子纳米喷射超分辨光刻(Super resolution lithography by photon nanojet)
2. 微纳工艺与纳米制备(Micro nano processing & nanofabrications):
 X射线光学中高高宽比菲涅尔波带片,汇聚透镜和光栅(High aspect ratio Fresnel zone plates, condenser, gratings )  纳米尺度反应离子刻蚀,深RIE,离子束刻蚀(Nanoscale RIE, DRIE, Ion beam etch)  纳米压印模板(NIL templates/stamps/shims)  氮化硅隔膜技术(SiNx membrane technique)  纳米压印制备微流体/纳流体(Microfluidic/nanofluidic channels by NIL)  纳米透镜研制超衍射极限成像(Nanolens for image beyond diffraction limit by photon nanojet effect)  原子力显微镜高高宽比探针制备(Manufacture of AFM tips)  纳米电机系统/微米电机系统(NEMS/MEMS technique)
二、纳米科学(Nanoscience)
1.纳米电子器件(Nanoelectronics):  高电子迁移率晶体管和T形栅(High electron mobility transistors (HEMTs) and T gates)  石墨烯、硫化钼光电器件和纳米带器件(graphene & MoS2: photoelectronic devices, nanoribbon devices)  低维系统量子输运系统(Quantum transport in lower dimensional systems:2DEG, 1DEG, 0DEG quantum dots)  纳米铁磁结构中与电子自选相关的输运(Spin relevant transport in nano ferromagnetic structures)
2.纳米光子学与超构材料(Nanophotonics & metamaterials):  二维、三维纳米光子晶体和超构材料的光学特性研究(Optical properties of 2D and 3D nanophotonics & metamaterials)  纳米结构色(Coloring effects by nanophotonic structures and metamaterials)  涡旋光场的超薄纳米结构形成与调控技术(Optical vortex (conversion from SAM to OAM by ultrathin nanoconverters)
3.纳米仿生结构(Nanobionic structure: technology, science and applications )  自然生物结构的纳米制备(Nanofabrications of naturally occurring biological nanostructures)  自然仿生结构的光学物理特性研究(Optical and physical property study of fabricated nanobionic structures)
1. 高电子迁移率晶体管和单片微波集成线路(HEMTs and MMICs)  所有T形栅的纳米制备工艺(Nanofabrications of all kinds of T shape gates)  GaN基、InP基和GaAs基HEMT器件的纳米制备与特性表征(Fabrications and characterizations of GaN-, InP and GaAs based HEMTs)  平面电感器、电容器、空气桥和薄膜电阻的纳米加工(Fabrications of inductors, capacitors, air-bridge and film resistors)  MMIC制备(Manufactures of MMICs)
2. X射线光学显微成像关键部件纳米加工研制技术(Nanofabrications of X-ray optical components)  高高宽比菲涅尔波带片(High aspect ratio zone plates (100 nm – 10 nm))  高高宽比汇聚透镜(High aspect ratio condensers (200 – 100 nm))  高高宽比纳米光栅(High aspect ratio gratings (100 – 50 nm))
三、国家重大工程项目(Large National Engineering Projects)
课程教学
研究生专业选修课:纳米技术与应用
学术兼职
2014年起:英国国家物理实验室(NPL),客座高级研究员
2013至今:长江学者评审专家
2011-2014:中科院电子所,客座研究员
2010:瑞士洛桑理工学院(EPFL)客座教授
IRSN Electronics杂志和英国e-book的编辑
英国工程与物理科学理事会(EPSRC)的评审员
Elsevier杂志和美国真空与科学技术杂志(JVST)的审稿员
科研项目
欧共体第七框架合作交流项目首席科学家(540万人民币):1. Microsystems and Bioanalysis Platforms for Health Care
英国工程物理(EPSRC)基础技术发展项目 2590万人民币,课题负责人:2. NANOSCOPE: looking inside a living cell with nanoscale resolution
论文著作
1.Continuous metal plasmonic frequency selective surfaces,OPTICS EXPRESS,2011,Vol. 19, No. 23,p23279
2.The fabrication of sub-30 nm T gates using SiNx as a supporting and passivation layer,Journal of Vacuum Science and Technology,2000,Vol. B18(6),p.3521
3.Metamaterials: optical activity without chirality,Phys Rev Lett,2009,Vol. 102,p.113902
4.Asymmetric Propagation of Electromagnetic waves through a Planar Chiral Structure,Phys Review Lett.,2006,Vol. 97,p.167401
5.Nanohole array as a lens,Nano Letters,2008,Vol. 58,p. 2469
6.Hyperspectral imaging of plasmonic nanostructures with nanoscale resolution,OPTICS EXPRESS ,2007,vol. 15 (18),11313-11320
7.Focusing of light by a nanohole array,Appl. Phys. Lett.,2007,90,091119
8. Effects of developing conditions on the contrast and sensitivity of hydrogen silsequioxane,Microelectronic Engineering,2006,vol. 83,p1119
9.One dimensional transport and gating of InAs/GaSb structures,Superlattices and Microstructures,1994,15,p41
10.A Low Field Magneto-transport Study of Localisation in a Mesoscopic Anti-dot Array,Physical Review,1993,B47,p.7354
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